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Noreen Harned Quotes

They were able to isolate and show that the defects that were a concern were really not in the multilayer coating, but more on the substrate itself, which comes down to a cleanliness issue. Still, you can't have the defects, but that's also an issue that's becoming more critical for 193. - Noreen Harned

Tags

Isolate | Show | Defects | Concern | Multilayer |

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What it means is that you never directly handle the mask, so you remove that act of particle generation. - Noreen Harned

They were able to isolate and show that the defects that were a concern were really not in the multilayer coating, but more on the substrate itself, which comes down to a cleanliness issue. Still, you can't have the defects, but that's also an issue that's becoming more critical for 193. - Noreen Harned

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